Measurement technology and intelligent instruments VI /
The requirements of high precision and of high-quality components and devices in meeting the needs of modern industry and society in disciplines such as semiconductors, optics, nanotechnology, MEMS, manufacturing, biomedical and environmental engineering, make measurement technology and intelligent...
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| Corporate Author: | |
|---|---|
| Other Authors: | , , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Uetikon-Zuerich, Switzerland ; Enfield, NH :
Trans Tech Publications Ltd.,
[2005]
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| Series: | Key engineering materials ;
volume 295-296. |
| Subjects: | |
| Online Access: | CONNECT |
