Acoustic wave and electromechanical resonators : concept to key applications /
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the te...
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| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Norwood, MA. :
Artech House,
©2010.
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| Series: | Artech House integrated microsystems series.
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| Subjects: | |
| Online Access: | CONNECT |
MARC
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| 100 | 1 | |a Campanella, Humberto. | |
| 245 | 1 | 0 | |a Acoustic wave and electromechanical resonators : |b concept to key applications / |c Humberto Campanella. |
| 246 | 3 | |a Acoustic wave & electromechanical resonators | |
| 260 | |a Norwood, MA. : |b Artech House, |c ©2010. | ||
| 300 | |a 1 online resource (xv, 345 pages) : |b illustrations | ||
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| 490 | 1 | |a Integrated microsystems series | |
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. | |
| 588 | 0 | |a Print version record. | |
| 520 | |a This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin. | ||
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| 500 | |a EBSCO eBook Academic Comprehensive Collection North America |5 TMurS | ||
| 650 | 0 | |a Acoustic surface wave devices. | |
| 650 | 0 | |a Electric resonators. | |
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