Acoustic wave and electromechanical resonators : concept to key applications /
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the te...
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Norwood, MA. :
Artech House,
©2010.
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| Series: | Artech House integrated microsystems series.
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| Subjects: | |
| Online Access: | CONNECT |
