Thin film materials : stress, defect formation, and surface evolution /
"Thin films play an important role in many technological applications including microelectronic device, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin fil...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Cambridge, UK ; New York :
Cambridge University Press,
2003.
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| Subjects: | |
| Online Access: | CONNECT |
MARC
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| 100 | 1 | |a Freund, L. B. | |
| 245 | 1 | 0 | |a Thin film materials : |b stress, defect formation, and surface evolution / |c L.B. Freund, S. Suresh. |
| 260 | |a Cambridge, UK ; |a New York : |b Cambridge University Press, |c 2003. | ||
| 300 | |a 1 online resource (xviii, 750 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
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| 504 | |a Includes bibliographical references (pages 713-737) and index. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | 0 | |g 1. |t Introduction and Overview -- |g 2. |t Film stress and substrate curvature -- |g 3. |t Stress in anisotropic and patterned films -- |g 4. |t Delamination and fracture -- |g 5. |t Film buckling, bulging and peeling -- |g 6. |t Dislocation formation in epitaxial systems -- |g 7. |t Dislocation interactions and strain relaxation -- |g 8. |t Equilibrium and stability of surfaces -- |g 9. |t The role of stress in mass transport. |
| 520 | 1 | |a "Thin films play an important role in many technological applications including microelectronic device, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin films. Physical phenomena are examined from the continuum down to the sub-microscopic length scales, with the connections between the structure of the material and its behavior described wherever appropriate | |
| 520 | 8 | |a While the book develops a comprehensive scientific basis with which stress, deformation and failure in thin film materials can be characterized, an attempt is also made to link the scientific concepts to a broad range of practical applications through example problems, historical notes, case studies and exercises. Of particular interest to engineers, materials scientists and physicists, this book will be essential reading for senior undergraduate and graduate courses on thin films"--Jacket | |
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