Thin film materials : stress, defect formation, and surface evolution /
"Thin films play an important role in many technological applications including microelectronic device, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin fil...
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| Format: | Electronic eBook |
| Language: | English |
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Cambridge, UK ; New York :
Cambridge University Press,
2003.
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| Online Access: | CONNECT |
