Resonant MEMS : fundamentals, implementation and application /
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of thei...
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Other Authors: | , , , |
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Format: | Electronic eBook |
Language: | English |
Published: |
Wiesbaden :
Wiley-VCH Verlag & Co. KGaA,
[2015]
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Series: | Advanced micro & nanosystems.
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Subjects: | |
Online Access: | CONNECT |