Enabling technology for MEMS and nanodevices /
Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applicati...
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| Other Authors: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim [Germany] :
Wiley-VCH,
©2004.
|
| Series: | Advanced micro & nanosystems ;
v. 1. |
| Subjects: | |
| Online Access: | CONNECT |
MARC
| LEADER | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | in00006299578 | ||
| 006 | m o d | ||
| 007 | cr cn||||||||| | ||
| 008 | 080327s2004 gw a ob 001 0 eng d | ||
| 005 | 20240124152642.5 | ||
| 020 | |a 9783527616701 | ||
| 020 | |a 3527616705 | ||
| 020 | |a 9783527616923 |q (electronic bk.) | ||
| 020 | |a 3527616926 |q (electronic bk.) | ||
| 020 | |z 352730746X |q (hd. bd.) | ||
| 020 | |z 9783527307463 |q (hd. bd.) | ||
| 024 | 7 | |a 10.1002/9783527616701 |2 doi | |
| 035 | |a (NhCcYBP)e80fa363d91f485b9a695405a0a7a4bb9783527616701 | ||
| 035 | |a 1wileyeba9783527616701 | ||
| 037 | |a 10.1002/9783527616701 |b Wiley InterScience |n http://www3.interscience.wiley.com | ||
| 040 | |a NhCcYBP |b eng |c NhCcYBP | ||
| 042 | |a dlr | ||
| 050 | 4 | |a TK7875 |b .E53 2004eb | |
| 082 | 0 | 4 | |a 620.5 |2 22 |
| 084 | |a ZN 3700 |2 rvk | ||
| 084 | |a ZN 3750 |2 rvk | ||
| 084 | |a ZN 4980 |2 rvk | ||
| 084 | |a ELT 270f |2 stub | ||
| 084 | |a ELT 090f |2 stub | ||
| 245 | 0 | 0 | |a Enabling technology for MEMS and nanodevices / |c edited by H. Baltes [and others]. |
| 260 | |a Weinheim [Germany] : |b Wiley-VCH, |c ©2004. | ||
| 300 | |a 1 online resource (xii, 427 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Advanced micro & nanosystems ; |v v. 1 | |
| 500 | |a Wiley EBA |5 TMurS | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | 0 | |a Print version record. | |
| 520 | |a Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces. | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2010. |5 MiAaHDL | ||
| 505 | 0 | |a Advanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices; Preface; Contents; List of Contributors; 1 M3: the Third Dimension of Silicon; 2 Trends in MEMS Commercialization; 3 Capacitive Interfaces for MEMS; 4 Packaging of Advanced Micro- and Nanosystems; 5 High-frequency Integrated Microelectromechanical Resonators and Filters; 6 MEMS in Mass Storage Systems; 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging; 8 Nanofluidic Modeling and Simulation; 9 Nanofluidics -- Structures and Devices; 10 Carbon Nanotubes and Sensors: a Review | |
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microelectronics. | |
| 650 | 0 | |a Nanotechnology. | |
| 700 | 1 | |a Baltes, H. |q (Henry) | |
| 730 | 0 | |a WILEYEBA | |
| 776 | 0 | 8 | |i Print version: |t Enabling technology for MEMS and nanodevices. |d Weinheim [Germany] : Wiley-VCH, ©2004 |z 352730746X |z 9783527307463 |
| 830 | 0 | |a Advanced micro & nanosystems ; |v v. 1. | |
| 856 | 4 | 0 | |u https://ezproxy.mtsu.edu/login?url=https://onlinelibrary.wiley.com/book/10.1002/9783527616701 |z CONNECT |3 Wiley |t 0 |
| 949 | |a ho0 | ||
| 975 | |p Wiley UBCM Online Book All Titles thru 2023 | ||
| 976 | |a 6006612 | ||
| 998 | |a wi |d z | ||
| 999 | f | f | |s 13fe93e7-d237-4d28-aeb3-348308f2e518 |i 42eec1b9-cbbc-428f-8a29-f897af62ccc6 |t 0 |
| 952 | f | f | |a Middle Tennessee State University |b Main |c James E. Walker Library |d Electronic Resources |t 0 |e TK7875 .E53 2004eb |h Library of Congress classification |
