Enabling technology for MEMS and nanodevices /
Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applicati...
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| Other Authors: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim [Germany] :
Wiley-VCH,
©2004.
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| Series: | Advanced micro & nanosystems ;
v. 1. |
| Subjects: | |
| Online Access: | CONNECT |
