Plasma-aided nanofabrication : from plasma sources to nanoassembly /

In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well...

Full description

Saved in:
Bibliographic Details
Main Author: Ostrikov, K.
Other Authors: Xu, Shuyan.
Format: eBook
Published: Weinheim : Wiley-VCH, ©2007.
Online Access:CONNECT