Fundamental principles of optical lithography : the science of microfabrication /
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used...
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Chichester, West Sussex, England ; Hoboken, NJ, USA :
Wiley,
©2007.
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| Subjects: | |
| Online Access: | CONNECT |
Table of Contents:
- Fundamental Principles of Optical Lithography: The Science of Microfabrication; Contents; Preface; 1: Introduction to Semiconductor Lithography; 2: Aerial Image Formation -The Basics; 3: Aerial Image Formation -The Details; 4: Imaging in Resist: Standing Waves and Swing Curves; 5: Conventional Resists: Exposure and Bake Chemistry; 6: Chemically Amplified Resists: Exposure and Bake Chemistry; 7: Photoresist Development; 8: Lithographic Control in Semiconductor Manufacturing; 8: Lithographic Control in Semiconductor Manufacturing.
