Fundamental principles of optical lithography : the science of microfabrication /
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used...
Saved in:
Main Author: | |
---|---|
Format: | Electronic eBook |
Language: | English |
Published: |
Chichester, West Sussex, England ; Hoboken, NJ, USA :
Wiley,
©2007.
|
Subjects: | |
Online Access: | CONNECT |