Handbook of cleaning for semiconductor manufacturing : fundamentals and applications /
This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physic...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Salem, Mass. ; Scrivener ; Hoboken, N.J. :
John Wiley & Sons, Inc.,
©2011.
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| Series: | Wiley-Scrivener.
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| Subjects: | |
| Online Access: | CONNECT |
