Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /
In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progres...
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| Format: | Electronic eBook |
| Language: | English |
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[Place of publication not identified] :
CRC Press,
2019.
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| Online Access: | CONNECT CONNECT CONNECT |
