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Lithography : main techniques /
Published 2011Table of Contents: “…Extreme Ultraviolet Lithography; 2.1. Introduction to extreme ultraviolet lithography; 2.1.1. …”
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Lithography; a complete handbook of modern techniques of lithography.
Published 1965Subjects: “…Lithography Technique.…”
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Lithography : principles, processes and materials /
Published 2011Table of Contents: “…""LITHOGRAPHY:PRINCIPLES, PROCESSES AND MATERIALS""; ""CONTENTS""; ""PREFACE""; ""PRINCIPLE, PROCESSES AND MATERIALS FOR NANO IMPRINT LITHOGRAPHY""; ""1. …”
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Computational lithography /
Published 2010Table of Contents: “…Optical Lithography Systems -- Rule-Based Resolution Enhancement Techniques -- Fundamentals of Optimization -- Computational Lithography with Coherent Illumination -- Regularization Framework -- Computational Lithography with Partially Coherent Illumination -- Other RET Optimization Techniques -- Source and Mask Optimization -- Coherent Thick-Mask Optimization -- Conclusions and New Directions of Computational Lithography -- Appendix A: Formula Derivation in Chapter 5 -- Appendix B: Manhattan Geometry -- Appendix C: Formula Derivation in Chapter 6 -- Appendix D: Formula Derivation in Chapter 7 -- Appendix E: Formula Derivation in Chapter 8 -- Appendix F: Formula Derivation in Chapter 9 -- Appendix G: Formula Derivation in Chapter 10 -- Appendix H: Software Guide.…”
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Nano-lithography /
Published 2011Table of Contents: “…Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. …”
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Nano-lithography /
Published 2011Table of Contents: “…Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. …”
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Computational lithography /
Published 2010Table of Contents: “…Optical Lithography Systems -- Rule-Based Resolution Enhancement Techniques -- Fundamentals of Optimization -- Computational Lithography with Coherent Illumination -- Regularization Framework -- Computational Lithography with Partially Coherent Illumination -- Other RET Optimization Techniques -- Source and Mask Optimization -- Coherent Thick-Mask Optimization -- Conclusions and New Directions of Computational Lithography -- Appendix A: Formula Derivation in Chapter 5 -- Appendix B: Manhattan Geometry -- Appendix C: Formula Derivation in Chapter 6 -- Appendix D: Formula Derivation in Chapter 7 -- Appendix E: Formula Derivation in Chapter 8 -- Appendix F: Formula Derivation in Chapter 9 -- Appendix G: Formula Derivation in Chapter 10 -- Appendix H: Software Guide.…”
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Electronic eBook -
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Multiphoton lithography : techniques, materials and applications /
Published 2016Table of Contents: “…Light Sources and Systems for Multiphoton Lithography / Ulf Hinze, Boris Chichkov -- STED-Inspired Approaches to Resolution Enhancement / John T Fourkas -- Materials. …”
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