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  1. 1
    Whole-angle MEMs gyroscopes : challenges and opportunities /

    Whole-angle MEMs gyroscopes : challenges and opportunities / by Senkal, Doruk, 1984-, Shkel, Andrei

    Published 2020
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  2. 2
    RF MEMS : theory, design, and technology /

    RF MEMS : theory, design, and technology / by Rebeiz, Gabriel M.

    Published 2003
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  3. 3
    Intracorporeal robotics : from milliscale to nanoscale /

    Intracorporeal robotics : from milliscale to nanoscale / by Gauthier, Michäel, 1975-, Andreff, Nicolas, Dombre, E.

    Published 2014
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  4. 4
    Micro- and nanoelectromechanical biosensors /

    Micro- and nanoelectromechanical biosensors / by Nicu, Liviu

    Published 2014
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  5. 5
    Mechanics of Microsystems.

    Mechanics of Microsystems. by Corigliano, Alberto

    Published 2017
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  6. 6
    Smart material systems and MEMS : design and development methodologies /

    Smart material systems and MEMS : design and development methodologies / by Varadan, V. K., 1943-

    Published 2006
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  7. 7
    Principles of MEMS /

    Principles of MEMS / by Lee, Ki Bang

    Published 2010
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  8. 8
    Microsensors, MEMS, and smart devices /

    Microsensors, MEMS, and smart devices / by Gardner, J. W. 1958-

    Published 2001
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  9. 9
    LIGA and its applications /

    LIGA and its applications /

    Published 2009
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  10. 10
    Micro- and nanosystems for biotechnology /

    Micro- and nanosystems for biotechnology /

    Published 2016
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  11. 11
    Introduction to microfabrication /

    Introduction to microfabrication / by Franssila, Sami

    Published 2010
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  12. 12
    Microsystems & nanoengineering.

    Microsystems & nanoengineering.

    Full Text Availability
    Electronic Journal

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  13. 13
    Micromachines.

    Micromachines.

    Published 2010
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    Electronic Journal

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