Measurement assurance for dimensional measurements on integrated-circuit photomasks /
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| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | Government Document eBook |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
1982.
|
| Series: | NBS technical note ;
1164. |
| Subjects: | |
| Online Access: | CONNECT CONNECT |
| LEADER | 01904nam a2200469Ii 4500 | ||
|---|---|---|---|
| 001 | mig00005971303 | ||
| 003 | OCoLC | ||
| 005 | 20151113033703.0 | ||
| 007 | cr c|||||||||| | ||
| 008 | 151113s1982 mdu ot f000 0 eng d | ||
| 024 | 8 | |a GOVPUB-C13-e093ca83ebd4bb2b49291a9a091832f6 | |
| 035 | 0 | 0 | |a ocn929066437 |
| 040 | |a NBS |b eng |e pn |e rda |c NBS |d GPO |d MvI | ||
| 049 | |a TXME | ||
| 074 | |a 0249-A (online) | ||
| 086 | 0 | |a C 13.46:1164 | |
| 099 | |a Online Government Document | ||
| 100 | 1 | |a Croarkin, Carroll. | |
| 245 | 1 | 0 | |a Measurement assurance for dimensional measurements on integrated-circuit photomasks / |c Carroll. Croarkin. |
| 264 | 1 | |a Gaithersburg, MD : |b U.S. Dept. of Commerce, National Institute of Standards and Technology, |c 1982. | |
| 300 | |a 1 online resource. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 490 | 1 | |a NBS technical note ; |v 1164 | |
| 500 | |a 1982. | ||
| 500 | |a Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. | ||
| 500 | |a Title from PDF title page. | ||
| 504 | |a Includes bibliographical references. | ||
| 650 | 0 | |a Integrated circuits |x Masks |x Measurement. | |
| 650 | 0 | |a Optical instruments |x Calibration. | |
| 700 | 1 | |a Croarkin, Carroll. | |
| 710 | 1 | |a United States. |b National Bureau of Standards. | |
| 830 | 0 | |a NBS technical note ; |v 1164. | |
| 856 | 4 | 0 | |z CONNECT |u https://purl.fdlp.gov/GPO/gpo105453 |t 0 |
| 907 | |a 5427956 |b 07-01-21 |c 07-01-21 | ||
| 998 | |a wi |b 07-01-21 |c m |d z |e - |f eng |g mdu |h 0 |i 1 | ||
| 910 | |a MTSUM2106 | ||
| 910 | |a DWS | ||
| 999 | f | f | |i 6ad2a6c0-b054-4d26-b4fe-adfe1c573c8f |s 6ec0dc53-206c-4fd5-8311-9b85e0b038fb |t 0 |
| 952 | f | f | |a Middle Tennessee State University |b Main |c James E. Walker Library |d Electronic Resources |t 0 |e C 13.46:1164 |h Library of Congress classification |
| 856 | 4 | 0 | |t 0 |u https://purl.fdlp.gov/GPO/gpo105453 |z CONNECT |
