Measurement assurance for dimensional measurements on integrated-circuit photomasks /
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| Main Author: | |
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| Corporate Author: | |
| Format: | Government Document eBook |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
1982.
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| Series: | NBS technical note ;
1164. |
| Subjects: | |
| Online Access: | CONNECT CONNECT |
| Item Description: | 1982. Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. Title from PDF title page. |
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| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references. |
