Introduction to microelectromechanical systems engineering /
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, a...
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| Format: | eBook |
| Language: | English |
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Boston :
Artech House,
©2004.
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| Edition: | 2nd ed. |
| Series: | Microelectromechanical systems series.
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| Subjects: | |
| Online Access: | CONNECT CONNECT |
