Introduction to microelectromechanical systems engineering /

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, a...

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Bibliographic Details
Main Author: Maluf, Nadim.
Other Authors: Williams, Kirt.
Format: eBook
Published: Boston : Artech House, ©2004.
Edition:2nd ed.
Series:Microelectromechanical systems series.
Online Access:CONNECT