TCAD for Si, SiGe and GaAs integrated circuits /
The first book that deals with a broad spectrum of process and device design, and modelling issues related to various semiconductor devices. This monograph attempts to bridge the gap between device modelling and process design using TCAD. Examples for types of Si-, SiGe-, GaAs- and InP-based heteros...
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| Main Authors: | , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
London :
Institution of Engineering and Technology,
2007.
|
| Series: | IET circuits, devices and systems series ;
v. 21. |
| Subjects: | |
| Online Access: | CONNECT |
Table of Contents:
- Preface; 1 Introduction; 2 IC technology and TCAD tools; 3 Diffusion and oxidation of SiGe/SiGeC films; 4 Strain-engineered MOSFETs; 5 SOI MOSFETs; 6 Heterostructure bipolar transistors; 7 SiGe/SiGeC HBT technology; 8 MOSFET: compact models; 9 HBT: compact models; 10 Design and simulation of high-speed devices; 11 Passive components; Index.
