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|b .M4835 1989
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|a 621.381
|2 20
|
| 092 |
|
|
|a 540
|b Am3a no.221
|
| 245 |
0 |
0 |
|a Microelectronics processing :
|b chemical engineering aspects /
|c Dennis W. Hess, editor, Klavs F. Jensen, editor.
|
| 260 |
|
|
|a Washington, DC :
|b American Chemical Society,
|c 1989.
|
| 300 |
|
|
|a xiv, 547 p. ;
|c 24 cm.
|
| 490 |
1 |
|
|a Advances in chemistry series ;
|v 221
|
| 500 |
|
|
|a Includes index.
|
| 504 |
|
|
|a Bibliography.
|
| 590 |
|
|
|a 90-02240
|
| 650 |
|
0 |
|a Microelectronics
|x Materials.
|
| 650 |
|
0 |
|a Integrated circuits
|x Design and construction.
|
| 650 |
|
0 |
|a Surface chemistry.
|
| 700 |
1 |
|
|a Hess, Dennis W.
|
| 700 |
1 |
|
|a Jensen, Klavs F.,
|d 1952-
|
| 830 |
|
0 |
|a Advances in chemistry series ;
|v 221.
|
| 907 |
|
|
|a 1316945
|b 07-23-12
|c 05-24-10
|
| 998 |
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|b 05-24-10
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|a 540
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|p Circulating
|a Middle Tennessee State University
|b Main
|c James E. Walker Library
|d Main Collection - Walker Library - 3rd Floor
|t 0
|e 540 Am3a no.221
|h Library of Congress classification
|i Book
|m 33082001266518
|n 1
|
