Microelectronics processing : chemical engineering aspects /
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| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Washington, DC :
American Chemical Society,
1989.
|
| Series: | Advances in chemistry series ;
221. |
| Subjects: |
| Item Description: | Includes index. |
|---|---|
| Physical Description: | xiv, 547 p. ; 24 cm. |
| Bibliography: | Bibliography. |
| ISBN: | 0841214751 |
