New approaches to image processing based failure analysis of nano-scale ULSI devices /

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance...

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Bibliographic Details
Main Author: Zalevsky, Zeev
Other Authors: Livshits, Pavel, Gur, Eran
Format: Electronic eBook
Language:English
Published: Oxford : William Andrew, 2014.
Series:Micro & nano technologies.
Subjects:
Online Access:CONNECT