System-level modeling of MEMS /

Filling a gap in the literature, this is the first handbook to simultaneously address the three most important approaches of system-level modeling: physical modeling with lumped elements and Kirchhoffian networks, modal modeling to accurately describe the mechanical domain, and mathematical modeling...

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Bibliographic Details
Other Authors: Bechtold, T., Schrag, Gabriele., Feng, Lihong.
Format: eBook
Published: Weinheim : Wiley-VCH, [2013]
Series:Advanced micro & nanosystems
Online Access:CONNECT