System-level modeling of MEMS /
Filling a gap in the literature, this is the first handbook to simultaneously address the three most important approaches of system-level modeling: physical modeling with lumped elements and Kirchhoffian networks, modal modeling to accurately describe the mechanical domain, and mathematical modeling...
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| Other Authors: | , , |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
[2013]
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| Series: | Advanced micro & nanosystems
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| Subjects: | |
| Online Access: | CONNECT CONNECT |
