LIGA and its applications /

"Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The auth...

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Bibliographic Details
Other Authors: Saile, Volker.
Format: eBook
Published: Weinheim : [Chichester] : Wiley-VCH ; [John Wiley, distributor], ©2009.
Series:Advanced micro & nanosystems ; 7.
Online Access:CONNECT