Plasma-aided nanofabrication : from plasma sources to nanoassembly /

In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well...

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Bibliographic Details
Main Author: Ostrikov, K.
Other Authors: Xu, Shuyan.
Format: eBook
Published: Weinheim : Wiley-VCH, ©2007.
Online Access:CONNECT
Table of Contents:
  • Plasma-Aided Nanofabrication; Contents; Preface; 1 Introduction; 2 Generation of Highly Uniform, High-Density Inductively Coupled Plasma; 3 Plasma Sources: Meeting the Demands of Nanotechnology; 4 Carbon-Based Nanostructures; 5 Quantum Confinement Structures; 6 Hydroxyapatite Bioceramics; 7 Other Examples of Plasma-Aided Nanofabrication; 8 Further Examples, Conclusions, and Outlook; References; Index.