Plasma-aided nanofabrication : from plasma sources to nanoassembly /
In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well...
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
©2007.
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| Online Access: | CONNECT CONNECT |
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| 100 | 1 | |a Ostrikov, K. |q (Kostya) | |
| 245 | 1 | 0 | |a Plasma-aided nanofabrication : |b from plasma sources to nanoassembly / |c Kostya (Ken) Ostrikov and Shuyan Xu. |
| 260 | |a Weinheim : |b Wiley-VCH, |c ©2007. | ||
| 300 | |a 1 online resource (xiii, 300 pages) : |b illustrations (some color) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a Plasma-Aided Nanofabrication; Contents; Preface; 1 Introduction; 2 Generation of Highly Uniform, High-Density Inductively Coupled Plasma; 3 Plasma Sources: Meeting the Demands of Nanotechnology; 4 Carbon-Based Nanostructures; 5 Quantum Confinement Structures; 6 Hydroxyapatite Bioceramics; 7 Other Examples of Plasma-Aided Nanofabrication; 8 Further Examples, Conclusions, and Outlook; References; Index. | |
| 520 | |a In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications. | ||
| 588 | 0 | |a Print version record. | |
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| 650 | 0 | |a Nanostructured materials. | |
| 650 | 0 | |a Plasma engineering. | |
| 650 | 0 | |a Low temperature plasmas. | |
| 650 | 0 | |a Manufacturing processes. | |
| 700 | 1 | |a Xu, Shuyan. | |
| 730 | 0 | |a WILEYEBA | |
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