Plasma-aided nanofabrication : from plasma sources to nanoassembly /
In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well...
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Other Authors: | |
Format: | eBook |
Language: | English |
Published: |
Weinheim :
Wiley-VCH,
©2007.
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Subjects: | |
Online Access: | CONNECT CONNECT |
Summary: | In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications. |
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Physical Description: | 1 online resource (xiii, 300 pages) : illustrations (some color) |
Bibliography: | Includes bibliographical references and index. |
ISBN: | 9783527611553 352761155X 9783527611560 3527611568 1281088021 9781281088024 |