Plasma-aided nanofabrication : from plasma sources to nanoassembly /

In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well...

Full description

Saved in:
Bibliographic Details
Main Author: Ostrikov, K.
Other Authors: Xu, Shuyan.
Format: eBook
Language:English
Published: Weinheim : Wiley-VCH, ©2007.
Subjects:
Online Access:CONNECT
CONNECT
Description
Summary:In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.
Physical Description:1 online resource (xiii, 300 pages) : illustrations (some color)
Bibliography:Includes bibliographical references and index.
ISBN:9783527611553
352761155X
9783527611560
3527611568
1281088021
9781281088024