Handbook of chemicals and gases for the semiconductor industry /

The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. The Handbook of Chemicals and Gases for the Semiconductor Industry is a convenient source of information on the properties, appli...

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Bibliographic Details
Main Author: Miśra, Āśutosha, 1970-
Other Authors: Hogan, Jeremiah D., Chorush, Russell.
Format: eBook
Published: New York : Wiley-VCH, ©2002.
Online Access:CONNECT